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Abstract:
A GaN-based current-aperture vertical electron transistor with source-connected field-plates (SFP-CAVET) is proposed and investigated by means of two-dimensional simulations. This device is characterized by the source-connected field-plates (SFP) at both sides, which leads to remarkable improvement of breakdown voltage (BV) without degradation of specific onresistance (R-on). Systematic analyses are conducted to reveal the mechanism of the SFP modulation effect on the potential and the electric held distributions and thus the BV improvement. Optimization and design of SFP-CAVET are performed for the maximum BV. Simulation results exhibit a R-on of 2.25 m Omega center dot cm(2) and a significantly enhanced BV of 3610 V in SFP-CAVET, indicating an average breakdown electric held of more than 240 V mu m(-1). Compared with conventional CAVET, both BV and average breakdown electric held in SFP-CAVET are increased by more than 121% while R-on remains unchanged. And the trade-off performance of BV and R-on in SFP-CAVET is also better than that in GaN-based CAVET with superjunctions (SJ CAVET). In addition, the fabrication process issues of the proposed SFP-CAVET are also presented and discussed. These results could break a new path to further improve the trade-off performance of BV and R-on in GaN-based vertical devices.
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SEMICONDUCTOR SCIENCE AND TECHNOLOGY
ISSN: 0268-1242
Year: 2018
Issue: 7
Volume: 33
2 . 6 5 4
JCR@2018
2 . 3 6 1
JCR@2019
ESI Discipline: PHYSICS;
ESI HC Threshold:103
JCR Journal Grade:2
CAS Journal Grade:3
Cited Count:
WoS CC Cited Count: 1
SCOPUS Cited Count: 1
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 0
Affiliated Colleges: