Translated Abstract
Artificial bionic compound eyes with multistage composite structure，inspired by the tertiary structure of insect compound eyes in nature, has characterized by small volume, high integration and high performance. It tend to have an extensive application prospect in the field of micro-optics and optical electronics, thus became one of the highlights in scientific research. However, due to lack of the key technology, which can be efficiently controlled, in micro-nano structure manufacturing on 3D surface, which has significantly restricted the ideal structure of multistage bionic compound eyes. In this paper, a novel method involved that secondary structures was manufactured firstly, followed by primary structures. It had adopted the technology, which was in combined with nano-imprinting, laser swelling and pneumatic forming technology, to manufacture the three-level composite structure. In addition, the key technologies and the parameters of the method had been investigated in this paper.
Firstly, the third-level nanostructures array with hydrophobicity and antireflective property was manufactured by nano-imprinting technique. The effect of process parameters on nanostructures was studied, and the optimal parameters were obtained. At the same time, the third-level micro-lens array with its property of optical imaging was obtained by embossing hot melt and photolithography. Moreover, the uniformity of large area micro-lens array was improved by hot bath method.
Secondly, the mechanism of ultra-fast laser light expansion was studied by using the ultra-fast laser processing platform, and the large-scale second-level micro-lens array structure had been improved through optimizing the process parameters. On the basis of this, three kinds of two-level composite structures with different surface structures were obtained. The structures were composed of the second-level micro-lens array and the third-level structures, and can also be obtained by folding the surface of the second-level micro-lens array. The performance ,i.e., hydrophobicity, antireflective, and optical imaging, of the three composite structures were measured respectively. The results proved that the micro-/nano- composite structure exhibited the most excellent property and was taken as three-level composite structure manufacturing in this paper.
Then, the mechanism of pneumatic forming was studied through COMSOL mechanics simulation, and were verified in the experiment. Thus, the artificial compound eyes with macro-/micro-/nano- hierarchical structures was manufactured in the process of nano-imprinting, laser swelling and pneumatic forming, and the high performance of the artificial compound eyes was verified in the test.
Finally, the forming mechanism of crystal and waveguide optical path was explored to determine the UV exposure of SU-8 UV photoresist, and the ideal structure can be obtained under the self-focusing effect. In addition, the simulation results of the light propagation trajectory in the structure proved that the binding effect of the waveguide optical path on the light was necessary to ensure the high quality imaging of the compound eye lens.
In this paper, based the research on nano-imprinting, laser swelling and pneumatic forming technology, it realized the efficient manufacturing of ideal compound eyes, and developed a novel macro-/micro-/nano- hierarchical structures forming method, which can efficiently manufacture the high performance artificial compound eyes. The method can precisely manufacture all levels of structures characteristics of artificial compound eyes, and it provides a powerful support for the optimization of high-performance artificial compound eye devices.
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