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Author:

Liu, Zhen (Liu, Zhen.) | Guo, Xin (Guo, Xin.) | Bu, Renan (Bu, Renan.)

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Abstract:

A novel type of 172 nm vacuum ultraviolet (VUV) light source was developed to improve its efficiency and reliability. The original work is the improvement of the electrode connectors and sealing of the magnesium fluoride window. The impact of the operating conditions including the waveforms of the driving voltage, input power and frequency, and pressure, on the characteristics of the discharge and light emission of the VUV light source were evaluated. The results show that the UV light emission intensity increases with the increases of the pressure, driving voltage and frequency. In addition, when it comes to low ignition voltage and high emission intensity, square-pulse outperforms sinusoidal voltage. For instance, driven by a square pulse at an input power of 6.8~8.2 W, the intensity is 5.5 times higher than that driven by a sinusoidal voltage.

Keyword:

Driving voltages High emission intensity Ignition voltage Input power Its efficiencies Light emission intensity Magnesium fluoride Operating condition Pulse waveforms Sinusoidal voltage Square pulse Structure design Vacuum ultraviolet Light Vacuum ultraviolets Wave forms

Author Community:

  • [ 1 ] [Liu, Zhen;Bu, Renan]Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Xi'an Jiaotong University, Xi'an 710049, China
  • [ 2 ] [Guo, Xin]AVIC Xi'an Flight Automatic Control Research Institute, Xi'an 710065, China

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Source :

Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology

ISSN: 1672-7126

Year: 2012

Issue: 12

Volume: 32

Page: 1114-1118

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count: -1

Chinese Cited Count: -1

30 Days PV: 1

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