Translated Abstract
Optical coherence tomography (OCT) is a new imaging technique, which is based on low coherence interferometer and get cross-sectional or three-dimensional images by measureingthe magntude and echo time delay of light and signal processing. OCT technology has aroused widespread concern due to its non-destructive，high resolution, instant imaging, etc. It has been widely applied in biological and medical fields as well as in industry fields. OCT can be broadly classified into two categories: time domain OCT (TD-OCT) and Frequency domain OCT (FD-OCT). Depending upon the combination of source and detector, FD-OCT has been further classified into two categories, spectral-domain OCT (SD-OCT) and swept-source OCT (SS-OCT).Firstly，this thesis introduces the OCT development history, applications and its status and trends. Secondly, it discusses the principle of TD-OCT and FD-OCT and analyses the advantages of the FD-OCT. Then it introduces several FD-OCT system structure, its imaging performance and noise removing method. A SD-OCT system based on the halogen light source is built, in which the wide bandwidth of halogen light source improve the system resolution and Michelson fiber interferometer simplify the system structure. In this system axial mechanical scanning is removed, the linear array detector of the spectrometer in this system can extracts all interference spectrum signals in one shot simultaneously，interference spectrum signals are transformed from wavelength space to wave number space through cubic spline interpolation, then depth information of the measured sample is retrieved via an inverse fourier transform. Film thickness measurement and silicon groove size measurement in microelectronic system has important significance in industry field. Some film samples and V-shaped groove tomographic images are got in this experiment The experimental results show that the structure of these industrial samples can be clearly dmonstrated through appropriate signal extraction and processing methods. After the analysis of the system structure and the imaging results, the system deficiencies and its areas needed to be improved are discussed. The work of this paper laid the foundation for further FD-OCT system research
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