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Translated Abstract

With　the　rapid　development　of　MEMS　and　nano　techniques，the　requirement　of　nano　precise　positioning　is　getting　higher　and　higher.　Many　research　results　show　that　surface　texture　can　effectively　improve　the　tribological　properties.　However，　the　evaluation　method　of　nano　precise　positioning　based　on　nano　scale　surface　texture　has　not　been　founded.　The　accurate　effect　of　nano　surface　texture　on　the　extreme　of　contact　nano　precise　positioning　needs　to　be　studied，　and　this　study　has　significant　scientific　and　applicable　values　on　promoting　the　development　of　the　interdisciplinary　of　tribology　and　surface　engineering.　Therefore，　the　main　research　content　of　this　paper　is　on　the　extreme　nano　precise　positioning　of　surface　texture.　



The　dry　frictional　curves　between　slider　and　substrate　with　different　textures　were　measured　with　self　designed　experimental　apparatus，　and　the　results　show　that　the　friction　coefficient　of　slider　is　bigger　when　the　peak　of　substrate　surface　texture　is　higher　and　the　surface　texture　is　sharper.　The　effect　working　conditions　(load，　velocity，　and　texture)　were　tested，　the　frictional　deformation　of　slider　increases　and　precise　positioning　decreases　with　the　increasing　of　load，　sliding　velocity　and　surface　texture.　The　effect　of　load　on　the　precise　positioning　of　slider　is　larger　than　that　of　sliding　velocity　and　surface　texture.



Fitting　formula　of　the　precise　positioning　of　slider/substrate　in　micro　scale　was　established　through　the　Finite　Element　(FE)　analysis　results.　During　the　sliding　contact　between　slider　and　textured　surface，　the　temperature　distribution　at　contact　surface　of　slider　shows　gradient　feature　in　the　inner　part　of　the　slider.　The　closer　to　the　contact　interface，　the　longer　of　sliding　time　and　the　higher　of　temperature.　The　generated　stress　distribution　shows　wave　forms.　With　the　increasing　of　δ/λ　of　surface　texture，　the　effect　of　surface　texture　on　extreme　precise　positioning　Ex　increases.　The　effect　of　load　on　the　maximum　of　slider　stress　is　bigger　than　that　on　the　maximum　of　temperature，　on　the　other　hand，　the　effect　of　slider　velocity　on　the　maximum　of　temperature　is　far　bigger　than　that　on　the　maximum　of　slider　stress.　The　effect　of　load　on　precise　positioning　is　bigger　than　that　of　the　slider　velocity　and　surface　texture.

The　Molecular　Dynamics　(MD)　Simulation　results　show　that　there　is　no　obvious　dislocation　generated　during　the　sliding　contact　of　rectangular　surface　texture，　and　the　generated　tribological　deformation　is　in　the　elastic　range.　The　relative　positions　of　slider　atoms　are　not　regular　arranged　any　more.　Precise　positioning　increases　with　the　increasing　of　load　and　the　decreasing　of　sliding　velocity.　The　precise　positioning　curves　shows　wave　forms　with　the　increasing　of　surface　texture　peak.　The　adjustment　of　the　effect　of　texture　on　precise　positioning　should　be　based　on　the　material　of　surface　texture　and　the　ratio　of　wave　peak　to　wavelength.　According　to　the　precise　positioning　feature　of　surface　texture，　in　the　micro　and　nano　scale，　the　effect　of　surface　texture　on　precise　positioning　shows　different　characters.

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