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Author:

Dong, B. (Dong, B..) | Huang, J. G. (Huang, J. G..) | Cai, H. (Cai, H..) | Kropelnicki, P. (Kropelnicki, P..) | Randles, A. B. (Randles, A. B..) | Gu, Y. D. (Gu, Y. D..) | Liu, A. Q. (Liu, A. Q..)

Indexed by:

CPCI-S Scopus EI

Abstract:

A bistable nano-opto-mechanical memory is designed, fabricated and experimentally demonstrated. A doubly-clamped silicon beam is deformed by optical gradient force generated from the ring resonator. The doubly-clamped silicon beam can be bended due to attractive optical gradient force generated by ring resonator. Due to the non-linear behavior of optical gradient force, the silicon beam has two stable positions which can be switched by controlling the light power transmitted inside the ring resonator. The nano-size of the memory enable for large scale integration, high speed operation and low power consumption. It has other potential applications such as optical switch, logic gate and actuator.

Keyword:

Author Community:

  • [ 1 ] [Dong, B.; Liu, A. Q.] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore
  • [ 2 ] [Dong, B.; Cai, H.; Kropelnicki, P.; Randles, A. B.; Gu, Y. D.] ASTAR, Inst Microelect, Singapore 117685, Singapore
  • [ 3 ] [Huang, J. G.] Xi An Jiao Tong Univ, Sch Mech Engn, Xian 710049, Peoples R China

Reprint Author's Address:

  • Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore.

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Source :

2014 IEEE 27TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)

ISSN: 1084-6999

Year: 2014

Page: 1091-1094

Language: English

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 11

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