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Abstract:
In order to suppress drain-induced barrier lowering in dual material gate SOI MOSFETs, halo doping is used in the channel near the source. Two-dimensional analytical models of surface potential and threshold voltage for the novel SOI MOSFET are developed based on the explicit solution of the two-dimensional Poisson's equation. Its characteristic improvement is investigated. It is concluded that the novel structure exhibits better suppression of drain-induced barrier lowering and higher carrier transport efficiency than conventional dual material gate SOI MOSFETs. Its drain-induced barrier lowering decreases with increasing halo doping concentration but does not change monotonically with halo length. The analytical models agree well with the two-dimensional device simulator MEDICI.
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Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors
ISSN: 0253-4177
Year: 2007
Issue: 3
Volume: 28
Page: 327-331
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 14
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